heaters | contact our heater manufacturing specialists

Therm-x combines years of experience in semiconductor vacuum thermal design with high tech manufacturing methods, advanced material knowledge. Design begins with completely understanding the application requirements in order to select the best materials and heating methods available. Starting with the wattage required to meet the heat-up requirements we select a heater that will give the necessary wattage,handle the temperature requirements specified. Thermal modeling can then be used to establish the heater layout to simulate thermal saturation. The materials and manufacturing processes will be selected based on requirements such as operating temperature, flatness and uniformity needed as well as chemical compatibility with the process. For high uniformity plate requirements we offer a hyper thermally conductive layer (PyrAlloy®) that is fused into the plate on top of the heater element. Thermal imaging and monitored wafer analysis enables Therm-x to develop the most effective design and part validation.

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